Thermochromic VO 2 thin film was synthesized on glass slide substrates by reactive RF magnetron deposition (T dep = 450 C) following annealing (T ann = 400 C). The method of synthesis results in the formation of preferred orientation vanadium dioxide with acicular nano-structure. The transmittance of monolayer VO 2 thin film reaches to 67% in the visible light region. This study provides a novel method to improve visible transmittance of VO 2 thin films, which boosts their practical applications in smart windows.
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