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Much contribution of the fuel cell using hydrogen and oxygen to the global environment is expected as a new clean energy system. It was used hydrogen storage alloys to supply hydrogen for the fuel cell. However, the surface contamination such as oxidation, hydroxidation and CO adsorption strongly reduces the reactivity of hydrogen with the alloy, and the initial activation and subsequent hydrogen absorption of the alloy become strongly inhibited.1-3 Therefore, the samples were treated by hydrogen fluorine to improve this demerit.4-8