As the increase in demand for microparts of metal foil, the micro-blanking process with many advantages of plastic deformation has been widely applied on microparts manufacturing area. But the fracture zone of shearing surface is always present and affects the service life of the part. This paper proposes a new micro-blanking die based on fine blanking technology. In this die, the rubber as the power transmission device is selected to provide a blank holder force and counter force. In the FEM simulation, the influence of a few key die parameters is considered such as punching clearance and fillet radius of female die and punch. And the fine micro-blanking experiments for superalloy foils were conducted to evaluate the feasibility of the die designs. The results had shown the fine micro-blanking die proposed was able to be used for micro-blanking and obtain metal microparts.