The goal of this study is to characterize the process latitude of an attenuated phase sgift mask on contact hole printing.The parameters chosen to examine the effect on process windows are numerical aperture (NA) and partial coherence (sigma). In addition to these, another important element we would like to determine from this test is the appropriate mask to wafer CD bias. The range of numerical aperture is from 0.5 to 0.63 and the range of partial coherence is from 0.32 to 0.67. Within the ranges of study, it is found that the DOF increases with decreasing partial coherence for iso contacts, but decreases with decreasing partial coherence for dense ones. DOF increases with decreasing numerical aperture for both iso and dense contact holes as expected. The best DOF of 2. 1 micron was obtained with 0.5 NA and 0.4 partial coherence.In general, the required energy to open contact holes increases with decreasing numerical aperture, while the impact of partial coherence on best dosage is not as predominant as NA does. The effect of pre-treatment delays the side lobe formation for iso contact holes while seems to have no effect on dense ones.

Background: Combined hepatocellular carcinoma and cholangiocarcinoma (cHCC-CC) is an infrequent type of primary liver cancer that comprises hepatocellular carcinoma (HCC) and cholangiocarcinoma (CC). This study investigated the clinicopathological features and prognosis among cHCC-CC, HCC, and CC groups.Methods: We prospectively collected the data of 608 patients who underwent surgical resection for liver cancer between 2011 and 2018 at E-Da Hospital, I-Shou University, Kaohsiung, Taiwan. Overall, 505 patients with cHCC-CC, HCC, and CC were included, and their clinicopathological features, overall survival (OS), and recurrence were recorded. OS and recurrence rates were analyzed using the Kaplan–Meier analysis.Results: In the entire cohort, the median age was 61 years and 80% were men. Thirty-five (7.0%) had cHCC-CC, 419 (82.9%) had HCC, and 51 (10.1%) had CC. The clinicopathological features of the cHCC-CC group were more identical to those of the HCC group than the CC group. OS was significantly lower in the cHCC-CC group than in the HCC group but was not significantly higher in the cHCC-CC group than in the CC group. The median OS of cHCC-CC, HCC, and CC groups was 50.1 months [95% confidence interval (CI): 38.7–61.2], 62.3 months (CI: 42.1–72.9), and 36.2 months (CI: 15.4–56.5), respectively. Cumulative OS rates at 1, 3, and 5 years in cHCC-CC, HCC, and CC groups were 88.5%, 62.2%, and 44.0%; 91.2%, 76.1%, and 68.0%; and 72.0%, 48.1%, and 34.5%, respectively. After propensity score matching (PSM), OS in the cHCC-CC group was not significantly different from that in the HCC or CC group. However, OS was significantly higher in the HCC group than in the CC group before and after PSM. Furthermore, the disease-free survival was not significantly different among cHCC-CC, HCC, and CC groups before and after PSM.Conclusion: The clinicopathological features of the cHCC-CC group were more identical to those of the HCC group than the CC group. The OS rate was significantly lower in the cHCC-CC group than the HCC group. However, after PSM, OS and disease-free survival in the cHCC-CC group were not significantly different from those in the HCC or CC group.