Finding a fast and precise method to measure the side-wall angle of periodic (or non-periodic) structures is still a very challenging problem in lithographic applications. For this reason, over the years, many techniques have been proposed to circumvent this limitation, with the final goal to give the most precise geometrical description of particular targets. Recently, the investigation of the optical angular momentum, which is encoded in the light's spiral spectrum, has brought new ways to acquire information about objects. In this work, we built an optical setup to put forward a new method to detect the side-wall angle in a fast and reliable way. The novelty of this work is the use of the spiral spectrum of a light beam for angle measurements, i.e. the light transmitted by a particular structure is projected onto properly tailored spatial modes and only the most sensitive mode to the side wall angle is detected and processed.

The output of the electronic waste has increased greatly along with the economic development and improvement of peoples living standard. It has become a difficult research problem that how to recycle the electronic waste efficiently. The paper forecasts the total quantity of the electronic waste based on the status analysis on the electronic waste recycles. Then it gives the operation sites in the recycle system such as recycling site, disassembly/test center, disposal factory, etc. through forecast and GIS combining with the general process of the electronic waste recycle. Finally, it designs the integral electronic waste recycle system based on GIS, and applies the design to the electronic waste recycle system of Huaian. Furthermore, it carries out overall evaluation from three aspects: economy, environment protection and society according to the application result. The evaluation shows good result.

The feasibility of the launched transport mode is studied by means of the physical and simulation model. And a new transport mode—launched transport mode, is put forward. After describing the overall design thinking, a preliminary design of the aircraft of the transport mode is carried out. Then the result is obtained that the new mode can save 10%~30% on cost and improve 30%~50% on efficiency than other transport modes when undertaking the equal transport task according to flight-test and simulation of the aircraft model. The launched transport mode provides a new mode for the short-to-medium distance transportation, as well as a new idea for the innovation of the transport mode in the future.