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A configurable metal-oxide-metal (MOM) capacitor structure is highly desirable for the diversified electronics market.Based on the analytical study on different sources of capacitance in MOM capacitors, and understandings of how the lithography process impacts the final shape of the capacitors, we proposed a highly configurable and extensible spiral based capacitor. Several forms of spiral capacitors have been generated and performed lithography simulation to obtain accurate capacitance value. Compared with the single-layer interdigital MOM capacitor, The proposed spiral based capacitors has been configured to achieve a 1.23× higher capacitance density than a MOM capacitor or the smallest variation among all structures.

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