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A new process for making SU-8 neural probe with fluidic channels and gold electrodes based on multilayered thin parylene and SU-8 is presented here. This approach can realize a thin 15 µm gap between electrode surface and neural cells. The thin gap will help to enhance the neural signal acquisition. Fluidic testing and mechanical testing are conducted to ensure the device reliability.

In this paper, a novel folded silicon resonant accelerometer is proposed. The proposed structure is able to release the stress arising from the mismatch of thermal expansion between silicon structure and glass substrate and to compensate the variation of the natural frequency with temperature. The analysis has shown that both bias and scale factor stability can be improved with the proposed structure. The concept is verified by the simulation and the results show that the temperature dependence of common-mode output frequency can be greatly reduced.

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