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An explosive detector based on heat absorption phenomena during melting process of explosives was developed. The detector consisted of an integrated sensor array with heating and detecting elements. The temperature distribution on the array beams was simulated by finite element analysis software, and the array was fabricated by using MEMS technology. By keeping constant temperature of the detecting beam close to the melting points of different explosives and heating the beam with voltage pulses, the array could detect different kinds of trace explosives dynamically. Experiment results indicated that the sensitivity of the sensor array was about 1 μg of cyclotrimethylenetrinitramine (RDX) or trinitrotoluene (TNT) samples.

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