The axial distributions of the optical emission intensity and metastable atom density are shown experimentally for DC and RF helium discharges. Significant differences in the cathode glow adjacent to the cathode sheath are perceived between the DC and RF discharges. These differences seem to lead to differences in the consistencies of their cathode sheaths. It is found that the RF glow is caused by a direct excitation of non-thermalized high-energy electrons; on the other hand, the DC glow is caused by a dissociative recombination of old molecular ions and thermalized low-temperature electrons in addition to the former process. A theoretical model of metastable atoms in the cathode glow region is proposed, and the theoretical curves are compared with the experimental results of metastable density distribution. The validity of this model is then assured, at least qualitatively.

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