Artificial superlattice thin films consisting of two different compositions of Pb(Zr,Ti)O3 (PZT), which are in tetragonal and rhombohedral phases at room temperature in the bulk state, were grown on (111)
c
SrRuO3/(111)SrTiO3 by pulsed laser deposition. Fairly perfect periodicity with sharp interfaces was observed by X-ray diffraction and scanning transmission electron microscopy. It was found that the film with each layer of 5 nm thickness had a single-domain structure for both PZT layers, which would arise from the strong mechanical and electrical coupling between PZT layers. The fabricated superlattice thin films showed saturated P–E hysteresis curves. Larger electromechanical response was observed in the films with smaller layer thickness.
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