MoO3 thin films were successfully prepared through chemical vapour transport (CVT) deposition and post-annealing. These films showed significantly improved optical properties. It was found that the transmittance reaches 80% with low reflectivity due to improved crystallinity and removal of oxygen vacancy states. Optical analysis shows that the index of refraction is around 1.55 with a flat dispersion curve across the visible. Furthermore, the band-gap energy is estimated to be approximately 3.5 eV. These properties suggest that CVT may be an effective thin film deposition technique for low-cost, large-area deposition of molybdenum oxides for chromogenic applications.

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