Optical isolators and circulators are indispensable for photonic integrated circuits (PICs). Despite of significant progress in silicon-on-insulator (SOI) platforms, integrated optical isolators and circulators have been rarely reported on silicon nitride (SiN) platforms. In this paper, we report monolithic integration of magneto-optical (MO) isolators on SiN platforms with record high performances based on standard silicon photonics foundry process and magneto-optical thin film deposition. We successfully grow high quality MO garnet thin films on SiN with large Faraday rotation up to -5900 deg/cm. We show a superior magnetooptical figure of merit (FoM) of MO/SiN waveguides compared to that of MO/SOI in an optimized device design. We demonstrate TM/TE mode broadband and narrow band optical isolators and circulators on SiN with high isolation ratio, low cross talk and low insertion loss.In particular, we observe 1 dB insertion loss and 28 dB isolation ratio in a SiN racetrack resonator-based isolator at 1570.2 nm wavelength. The low thermo-optic coefficient of SiN also ensures excellent temperature stability of the device. Our work paves the way for integration of high performance nonreciprocal photonic devices on SiN platforms.

Interaction between light and magnetism in magneto-optical (MO) nanophotonic devices has been actively studied in the past few years. The recent development of MO all-dielectric resonators and metasurfaces has led to the emergence of various novel MO phenomena that were not observed in their bulk counterparts. For example, a large s-polarized transverse MO Kerr effect can be observed at magnetic resonance wavelength, which cannot exist in the bare MO films. We review recent developments in nanophotonic devices based on MO materials and focus on different modes and related MO effects in nanophotonic structures with emphasis on recently discovered new MO phenomena in magnetoplasmonics and all-dielectric nanostructures, such as dark mode, all-dielectric Mie resonance and waveguide mode. Further, we discuss the potential applications of these nanostructures for biological/chemical sensing, magnetic field sensing, and magnetic field-controlled active and nonreciprocal metasurfaces.

No abstract