The effects of preparing condition on crystallographic orientation for electrodeposited aluminum from the plating solution with aluminum chloride (AlCl 3 ) and dimethyl sulfone (DMSO 2 ) were investigated. The molar ratio of DMSO 2 :AlCl 3 was controlled from 10:1 to 10:5. The temperature range of the solution was from 110 to 150°C. The current density was set from 300 to 600 A/m 2 . The crystallographic orientation of the samples was strongly influenced by the solution composition and temperature. The films from the solution with ratio of 10:3 exhibited the highly (200) preferred orientation. On the other hand, current density hardly affected the crystallographic orientation within our current density range. The crystallographic orientation is discussed by means of the Pangarov's model based on the two-dimensional nuclei theory.
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