The paper analyzes the structure and properties of metal, cermet, and ceramic NbMoCrTiAl high-entropy alloy (HEA) coatings formed on solid substrates by plasma-assisted vacuum arc deposition (from multicomponent gas-metal plasma through Nb, Mo, Cr, and TiAl cathode evaporation in argon and/or a mixture of argon and nitrogen). The analysis shows that all coatings represent a nanocrystalline (3–5 nm) multilayer film. The metal coating has a bcc lattice (a = 0.3146 nm). The ceramic coating has an fcc lattice (an uncertain lattice parameter due to highly smeared diffraction peaks). The coating hardness increases in the order of metal, cermet, and then ceramic, reaching 43 GPa at Young’s modulus equal to 326 GPa. When heated in air, the metal and cermet coatings start to oxidize at 630–640 °C, and the ceramic coating at 770–780 °C.

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