Yutaka Inaba scite author profile

We constructed the new method to analyze thermally stimulated current (TSC) using maximum entropy method. This method allows us to extract trap density depending on trap energy level [Nt(Et)] from a TSC curve. Using this to analyze TSC of as-deposited, nitrided, and reoxidized thin silicon dioxide films, we were able to determine Nt(Et) of hole traps with very highly energy resolution and to observe the generation of nitrogen related hole traps.

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Yutaka Inaba

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Detection of nitrogen related traps in nitrided/reoxidized silicon dioxide films with thermally stimulated current and maximum entropy method

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