Tilted diffraction gratings with highly refractive will be an important element for smart glass to realize a metaverse such as AR (Augmented Reality)/VR (Virtual Reality). Nanoimprinting, which can directly process a variety of materials for a variety of shapes, is well suited for mass production of tilted gratings, and many approaches have been reported. In nanoimprinting, one of the keys is to release the gradient grating shape without defects. In this report, we analyzed the strain generated during peeling release and tear release by computer simulation, and investigated a low-damage peeling method for releasing the tilted structure.