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Heavily doped polysilicon layers have been widely used in the fabrication of microelectromechanical systems (MEMS). However, the investigation of high selectivity, anisotropy, and excellent uniformity of heavily doped polysilicon etching is limited. In this work, reactive ion etching of undoped and heavily doped polysilicon-based hydrogen bromide (HBr) plasmas have been compared. The mechanism of etching of heavily doped polysilicon is studied in detail. The final results demonstrate that the anisotropy profile of heavily doped polysilicon can be obtained based on a HBr plasma process. An excellent uniformity of resistance of the thermocouples reached ± 2.11%. This technology provides an effective away for thermopile and other MEMS devices fabrication.

The urban-rural income gap expanded increasingly throughout the country has become a major contradiction that it is needed to face during the targeted poverty alleviation, stabilizing economic development and building a harmonious community, and it has been in an urgent need to develop inclusive finance, reduce financial threshold and transaction costs, loosen credit restriction in poor regions and shorten the income gap in order for a high-quality economic progress. Based on analyzing relations between inclusive finance and income gap, the article has made it clear that the inclusive finance can work well to inhibit the income gap, varying with regions as weak in the east region, followed by the middle, and strong in the west. It is concluded that to greatly promote the inclusive finance, create an inclusive finance development environment in poor areas, loosen the credit restriction over farmers and increase the income of the poor will be playing a far and deep role in improving the existing income gas in the country.

AI governance has been increasingly preeminent in digital world which presents a practical challenge of combining technical digital implementation with legal governance in real world. This work proposes a strategical bridging framework between AI governance policies and technologies on the fundamental content expression modals of data, information and knowledge, and crossing modals processing of DIKW content/resources through formalization abstract or intangible policies and their interactions as concrete technical tangible executions of modal transformations, essential computation and reasoning. The essential content oriented formalization, computation and reasoning of features, policies and associations bridging legal pursue and technical details is unified based our proposed existence computation and relationship defined everything of semantics mechanisms, which we further proposed as essence computation and reasoning for multiple modal and cross modal content. We demonstrate the feasibility and effectiveness of our essential content oriented multiple modals analysis and modeling through construction of a systemic privacy protection framework in the background of the whole process of perception, storage, transition and processing of user generated content in virtual communities. This solution framework seamlessly integrates originally discrete policies and demands on fairness, personal security, financial security, peace and quiet, autonomy, integrity against commodification and reputation at the technical execution level in terms of specific activities and concrete actions inside and cross data modal, information modal and knowledge modal.