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An uni ed strategy for achieving heterogeneous tool integration within the technology computeraided design (TCAD) realm is presented. Geometry, grid and surface mesh servers are de ned and implemented in a program that contains the di erent data and provides common services for TCAD applications. These services form the backbone of the integration framework. Functional abstraction is used to provide uni ed access to the servers' data and procedures. The role of each server and their interactions, including those with applications, are delineated. Existing tools such as SUPREM-IV and SPEEDIE, together with new tools have been integrated to illustrate the utility and versatility of the approach. This paper discusses the integration strategy, shows results and fully speci es standard functional server interfaces needed for TCAD tool integration.