Anatase Ti0.93Co0.07O2 films, synthesized by pulsed-laser deposition, have been investigated in the transmission electron microscope using selected area electron diffraction, energy dispersive x-ray analysis, and electron-energy-loss spectroscopy (EELS), and by x-ray diffraction measurements. It is found that Co ions are soluble in anatase, and that the unit-cell c-axis parameter is shortened, in some areas to even less than that in pure TiO2 anatase films. This observation was ascribed to substitution of the smaller Co3+ ions into the TiO2 anatase lattice. The EELS data confirm that Co is in either a +2 or +3 formal oxidation state in ferromagnetic Ti0.93Co0.07O2 films.
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