We experimentally demonstrate a low-loss and lowcrosstalk 16-channel 200 GHz-channel-spacing arrayed waveguide grating router (AWGR) with a size of 0.67×0.37 mm 2 , targeting for C-band wavelength division multiplexing (WDM) interconnect routing applications. As a result, the AWGR features a channel spacing of 200±10 GHz, a free spectral range of 25.62 nm and a 3 dB channel bandwidth of 0.9 nm. Based on comprehensive optimal design, the measured characterization revealed 5.55 dB maximum channel loss non-uniformity with 1.13 dB best-case channel insertion loss. Besides, the fabricated device exhibits good cyclic-frequency operation for all 16×16 port combinations with channel crosstalk of -15.11 dB.

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The arbitrary ratio power splitter is widely used in photonic integrated circuits (PICs), for signal monitoring, power equalization, signal feedback, and so on. Here we designed a fabrication-tolerant, compact, broadband, and low-loss arbitrary ratio power splitter. The proposed arbitrary ratio power splitter was realized with an adiabatically tapered silicon rib waveguide with 70 nm shallow etches and an S i 3 N 4 waveguide. The fabrication analysis confirmed that both of them are robust to fabrication errors. 3D finite-difference time-domain simulations show a very low excess loss (less than 0.02 dB for S i 3 N 4 waveguide and 0.05 dB for Si rib waveguide), and a broadband operating wavelength range (100 nm). Good fabrication tolerance and standard critical dimensions make the arbitrary ratio power splitter compatible with the standard fabrication process of commercial silicon photonic foundries.