Structureless Zr75Pd25 amorphous metal coatings were obtained using DC magnetron sputtering with an average deposition rate of 1.3 nm/s and a substrate temperature of 40 oC, as well as the crystalline coatings at a higher temperature. The equilibrium phase composition is observed at a temperature 350 oC. At intermediate temperature mainly the PdZr phase is formed against the equilibrium PdZr2 phase. The roughness of the obtained amorphous coatings is of 0.2–0.5 nm, which is an order of magnitude lower than that of crystalline coatings of the same composition.
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