The kinetics of formation of the clusters in magnetron plasma during the motion of a particle flow obtained by sputtering of La0.7Sr0.3MnO3 target followed by the deposition of clusterized amorphous layers on an extended glass substrate was studied. The effect of ion-acoustic wave on the spatial modulation of local structure and properties of clusterized medium at the presence of multivalent manganese ions in the plasma is revealed.

The possibility of quantitative estimation of the film thickness using cationic composition data, obtained by the INCA Energy-350 energy dispersive spectrometer which is integrated in electron microscope the JSM-6490 LV has been revealed. The application of this method is especially important in the case when the SEM image has insufficient contrast between of the film and substrate regions.