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Results of researches on coaxial one- and two-barrier excilamps based on molecules XeCl* (λ ∼ 308 nm), KrCl* (λ ∼ 222 nm), XeBr* (λ ∼ 282 nm) and KrBr* (λ ∼ 206 nm) with a short-pulse duration of radiation are given. The peak power of radiation ∼500 W cm−2 and 4 ns full width at half-maximum (FWHM) are obtained on excitation of a working mixture by the high-voltage pulse generator ‘Radan-150’ with a nanosecond duration in mixtures with a ratio of rare gas/halogen = 50/1 and total pressure of 500 Torr. The peak power of radiation of the one-barrier KrCl-excilamp excited by the combined Fitch circuit is 1.1 kW cm−2 at 107 ns FWHM.

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