2‐D Experimental Study of the Plasma Parameter Variations of the Magnetically Sustained DC Discharge in Cylindrical Symmetry in Argon

Holík, Miroslav; Bilyk, O.; Marek, A.; Kudrna, P.; Behnke, J. F.; Tichý, M.

doi:10.1002/ctpp.200410090

Cited by 9 publications

(19 citation statements)

References 9 publications

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“…The results of the electron density and plasma potential were presented. The model results qualitatively agree with experimental observations [1,8,9,10], further effort in modeling is still needed.…”

Section: Resultssupporting

confidence: 78%

“…As we presented in former papers, e.g. [1], by the study of axial and radial dependence of the plasma parameters, the axial inhomogeneities were observed, which couldn't be reproduced by the 1-D PIC model. The 2-D model was then used to try to explain the presence of the local minimum of the plasma density in the middle of the discharge vessel.…”

Section: Introductionmentioning

confidence: 77%

“…The PIC model should answer questions, which originated from the experimental study of the plasma parameters -presented e.g. in [1]. § To whom correspondence should be addressed (bilyk@mbox.troja.mff.cuni.cz)…”

Section: Introductionmentioning

confidence: 99%

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A study of discharge fluctuations in magnetically-supported dc discharge in cylindrical and inverted cylindrical configuration

et al. 2004

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Abstract.We have investigated apparently stochastic fluctuations of magnetically-supported dc discharge in cylindrical coaxial configuration. In the system the electric field had radial direction while the magnetic field was applied axially. The discharge vessel length was 12 centimetres. Working gas was typically argon at pressure of several Pa, magnetic field 10-50 mT.The contribution describes experimental results -frequency and phase analysis of the instabilities, which we detected in our experimental system in both the conventional and inverted magnetron configurations.We bring also 2-D PIC model of the dc discharge under conditions, which can be achieved in the experimental apparatus. The PIC model should answer questions, which originated from the experimental study of the plasma parameters -presented e.g. in [1]. § To whom correspondence should be addressed (bilyk@mbox.troja.mff.cuni.cz)

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Section: Resultssupporting

confidence: 78%

Section: Introductionmentioning

confidence: 77%

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A study of discharge fluctuations in magnetically-supported dc discharge in cylindrical and inverted cylindrical configuration

et al. 2004

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“…During the run time of the SFB 198 two magnetron systems were examined, at first the shorter magnetron with a length of 12 cm and only one port for probe measurements in the center of the axial extension of the CMD between the two magnetic coils [1], [3], [10]. At the end of the CMD system exist two metallic limiters connected to cathode.…”

Section: Introductionmentioning

confidence: 99%

“…The electron distribution functions, electron density and mean energy, potential profiles [1], [2] [3], [4], [10] and distributions of the metastable, resonance and radiating atoms [16], [26] were measured in radial and axial position in dependence on the magnetic field strengths and the discharge currents. Simultaneously, the processes occurring in the CMD were simulated by various PIC-MCC [6], [9], [24] and non-hydrodynamic kinetic models [15], [16], [17], [18], [19], [28].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Diagnostic of the Plasma of Magnetic Field Supported Discharges

Porokhova

Holík

Bilyk

et al. 2005

Contrib. Plasma Phys.

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In this paper we present an experimental study of the variations of plasma parameters in both the axial as well as in radial directions in a 30 cm long cylindrical magnetron with outer cylindrically-shaped anode (diameter 58 mm) and coaxially placed cathode with a diameter of 1.8 cm. The measurements were made using three radially movable cylindrical Langmuir probes placed at three different axial positions between the magnetic coils. From the measurements there were evaluated electron density, electron mean energy, plasma potential and floating potential in dependence of the magnetic field (10 -40 mT) and the argon pressure (2 -7 Pa). In order to measure the axial variations of the discharge current, one half of the cathode length is segmented into 14 isolated segments with length of about 10 mm.The physical processes occurring in electrode regions and the positive column of a cylindrical magnetron discharge in crossed electric and magnetic fields are investigated basing on the solution of the Boltzmann kinetic equation by a multiterm decomposition of the electron phase space distribution function in terms of the spherical tensors. The influence of the distribution function anisotropy on the absolute values and radial profiles of the electron density and rates of various transport and collision processes is analyzed. The spiral lines for the directed particle and energy transport are obtained to illustrate the anisotropy effects in dependence on magnetic field. The electron equipressure surfaces are constructed in the form of ellipsoids of pressure and their transformation in the cathode and anode regions is studied. A strong anisotropy of the energy flux tensor in contrast to a weak anisotropy of the momentum flux density tensor is found. Particular results are obtained for the cylindrical magnetron discharge in argon at pressure 3 Pa, current 200 mA and magnetic fields ranging within 10 − 40 mT.

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The Influence of a Longitudinal Magnetic Fields on a Non‐Uniform Positive Column

Akbar¹,

Bilikmen²

2007

Contrib. Plasma Phys.

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The variations of plasma parameters of a dc discharge in a non-uniform magnetized plasma were measured using fast floating double Langmuir probes. A solenoid is used to produce a uniform magnetic field parallel to the discharge axis. The axial changes of the plasma parameters are presented in the range of longitudinal magnetic fields 200 to 600 Gauss at the pressure range 0.3 to 2.1 Torr and discharge currents 5 and 15 mA in argon gas. The experimental results indicate that, as a consequence of the axial magnetic field and the variations in the discharge tube radii, the plasma parameters at small radius exhibit obvious changes in their distributions along the axis compared to the situation of unmagnetized plasma.

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2‐D Experimental Study of the Plasma Parameter Variations of the Magnetically Sustained DC Discharge in Cylindrical Symmetry in Argon

Cited by 9 publications

References 9 publications

A study of discharge fluctuations in magnetically-supported dc discharge in cylindrical and inverted cylindrical configuration

A study of discharge fluctuations in magnetically-supported dc discharge in cylindrical and inverted cylindrical configuration

Modeling and Diagnostic of the Plasma of Magnetic Field Supported Discharges

The Influence of a Longitudinal Magnetic Fields on a Non‐Uniform Positive Column

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