200mm manufacturing solution for Coupled Resonator Filters

4-inch transparent plates based on thin-film AlN actuators for haptic applications

“…First we deposited a 250 nm thick silicon oxide (SiO 2 ) layer. The piezoelectric stack consists of 2 μm thick AlN in between 220 nm thick Molybdenum bottom electrode and 220 nm thick Molybdenum top electrode [17] . The AlN is deposited using reactive sputtering from an aluminum target under a nitrogen atmosphere.…”