202 Analysis for Optical Property of Calcium Fluoride Single Crystal with Consideration of Intrinsic Birefringence

Kitamura, Yoshiichiro; Miyazaki, Noriyuki; Nagakura, Naoto; Nawata, Teruhiko

doi:10.1299/jsmecmd.2012.25.120

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“…32 Analysis results of optical path difference distribution for respective growth CaF 2 single crystal windows under incidence of 633nm wavelength light ( ) (Fig. 32(a) is quoted from Kitamura et al, 2012).…”

Section: Resultsmentioning

confidence: 99%

“…When λ is large enough compared with unit cell, B ij is independent of q, and given by Fig. 21 B ij = B ij λ, q ( ) Mechanical loads acting on CaF 2 single crystal chamber window of gas laser light source (Kitamura et al, 2012). Kitamura and Miyazaki, Mechanical Engineering Reviews, Vol.4, No.1 (2017) [DOI: 10.1299/mer.…”

Section: Intrinsic Birefringencementioning

confidence: 99%

“…23 An indicatrix with consideration of (Kitamura et al, 2012). Kitamura and Miyazaki, Mechanical Engineering Reviews, Vol.4, No.1 (2017) [DOI: 10.1299/mer.16-00376] (74) Therefore, the inverse dielectric constant tensor is expressed as follows by taking into account the dependence on the wavelength and light propagation direction: (75) When we redefine A 3 (λ) q 2 δ ij l i 2 as ΔB I ij , the birefringence Δn, taking into account the intrinsic birefringence in addition to the stress birefringence, is expressed as follows:…”

Section: Intrinsic Birefringencementioning

confidence: 99%

“…Fig. 24 Geometry of circular slab ingot and its finite element mesh for stress analysis (Kitamura et al, 2012 Crystal orientation, light axis and analysis coordinate system for a <111>-growth CaF 2 single crystal window (Kitamura et al, 2012).…”

Section: Birefringence Analysismentioning

confidence: 99%

“…Angle of incidence, rotation angle and definition of u 1 -u 2 -u 3 light axis coordinate system (Kitamura et al, 2012). and Miyazaki, Mechanical Engineering Reviews, Vol.4, No.1 (2017) [DOI: 10.1299/mer.16-00376]…”

Section: Fig 25mentioning

confidence: 99%

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Birefringence simulations of single crystals

Kitamura

Miyazaki

2017

Mechanical Engineering Reviews

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Fluoride single crystals such as calcium fluoride (CaF 2 ) belonging to the cubic crystal system and magnesium fluoride (MgF 2 ) belonging to the tetragonal crystal system are utilized as optical elements in high power lithography systems. In such uses of the single crystals, birefringence is an important phenomenon that affects optical performance. Based on the papers published by the present authors, we review the birefringence of CaF 2 and MgF 2 single crystals. Intrinsic birefringence is dealt with in addition to stress birefringence. First of all calculation methods for stress birefringence are presented. They are the Jones calculus, an exact method, and the average stress method, an approximate method, and the relation between the two methods is given. In the stress birefringence simulations after annealing of CaF 2 single crystal, the importance of time-dependent nonlinear deformation behavior of a material called creep is pointed out in calculating residual stress that induces stress birefringence. When the wavelength of light becomes down to the vacuum ultraviolet region, CaF 2 single crystal shows intrinsic birefringence in addition to stress birefringence. Birefringence simulations of a CaF 2 single crystal chamber window of an ArF excimer laser light source are performed by considering both stress birefringence and intrinsic birefringence to evaluate the optical performance and to obtain the optimum condition of CaF 2 single crystal window. MgF 2 single crystal shows intrinsic birefringence even for visible light because of its strong crystal anisotropy. The results of birefringence analyses are shown for MgF 2 single crystal as an example of combining stress birefringence with intrinsic birefringence under a visible light condition.

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Section: Resultsmentioning

confidence: 99%

Section: Intrinsic Birefringencementioning

confidence: 99%

Section: Intrinsic Birefringencementioning

confidence: 99%

Section: Birefringence Analysismentioning

confidence: 99%

Section: Fig 25mentioning

confidence: 99%

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