2015 16th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices 2015
DOI: 10.1109/edm.2015.7184478
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2D silicon nanopillars arrays for photonics

Lyudmila S. Golobokova
1
,
Yuri V. Nastaushev
2
,
F. N. Dultsev
3
et al.

Abstract: In this paper, particularities of ordered silicon nanopillars (Si NP) arrays formation by mean electron beam lithography and dry etching were studied. The optical and electrical properties of the Si NPs were investigated.Index Terms -silicon nanopillars, electron beam lithography, nanophotonics.

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