2D spectroscopic observation on effect of nitrogen species on CH abundance and morphology of carbonaceous film by plasma-enhanced CVD

Visualization of Two-Dimensional Excitation Temperatures in CH4/N2/Ar Plasmas for Preparation of Carbonaceous Materials

“…These are also in good agreement with the results of the Boltzmann plot. In our previous work, we presumed from the difference in the spectral emission intensity that the excitation temperature in the N2-rich (CH4-lean) plasma was lower than that in N2-lean (CH4-rich), and the lower excitation temperature in the N2-rich (CH4-lean) plasma contributed to a compacter microstructure [8]. The present work supports this effort experimentally.…”

“…Based on the results of Boltzmann plot and visualization of 2D excitation temperature, it was found that the excitation temperature in the N2-rich (CH4-lean) plasma was lower than that in N2-lean (CH4-rich) due to the different excited and reaction mechanisms of nitrogen and methane. The lower excitation temperature in the N2-rich (CH4-lean) plasma, as suggested in our previous work [8], contributed to a compacter microstnicture in the resulting deposit by PECVD.…”

“…Only a few researchers have reported temperature mapping by plotting the temperature values at the different observation positions (ID). All these temperature profiles were not intuitive enough to know the spatial distribution of the plasma temperatures, which were suggested to be important to the surface morphologies of the resulting films from the plasma enhanced chemical vapor deposition (PECVD) process [8].…”