3-state, high contact and release force RF MEMS switch designed based on MetalMUMPs process

Mirzajani, Hadi; Aghdam, Esmaeil Najafi; Ghavifekr, Habib Badri; Jafarpour, Aliasghar

doi:10.1109/iraniancee.2017.7985463

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3-state, high contact and release force RF MEMS switch designed based on MetalMUMPs process

Cited by 5 publications

References 22 publications

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