30.1: Flexible Image Sensor Made of a‐Si:H TFTs on Metal Foil

Abstract

We have developed a flexible image sensor using hydrogenated amorphous silicon thin film transistor (a‐Si:H TFT) on metal foil. The metal foil was treated by electrolytic polishing and thus its RMS surface roughness was reduced from 1205 to 71.6 Å. The sensor has 160 × 128 pixels, where a pixel has one switching TFT, one sensor TFT and a storage capacitor. A clear image was demonstrated on the metal foil using conventional pixel having two transistors and one cap.