320 Development of Fabrication Method of BaTiO_3 Thin Films by using RF-Magnetron Sputtering Method

Hasegawa, Tsuyoshi; Hwang, Hwisim; Katayama, Tsutao; Nakamachi, Eiji

doi:10.1299/jsmekansai.2009.84._3-20_

The Proceedings of Conference of Kansai Branch

2009

DOI: 10.1299/jsmekansai.2009.84._3-20_

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320 Development of Fabrication Method of BaTiO_3 Thin Films by using RF-Magnetron Sputtering Method

Tsuyoshi Hasegawa

Hwisim Hwang

Tsutao Katayama

et al.

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320 Development of Fabrication Method of BaTiO_3 Thin Films by using RF-Magnetron Sputtering Method

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