3280 Analysis of Measurement Errors of a Diffuse-Reflection Type Laser Displacement Sensor for Profile Measurement

Abstract

For the efficiency of machining of high-precision parts, their on-machine measurement plays a very important role. Laser displacement sensors enable high speed measurement with cost effectiveness. However, laser displacement sensors are potentially subject to several measurement errors. In this paper, the measurement error of a diffuse-reflection-type laser displacement sensor is analyzed for profile measurement. To this end, multi-reflection error is predicted by a simple beam tracking simulation. Based on the simulation result, the measurement range of a laser displacement sensor is tuned narrower to reduce multi-reflection error. Then, measurement errors were evaluated.