3D Interdigital Electrodes Dielectric Capacitor Array for Energy Storage Based on Through Glass Vias

Abstract

It is urgent to develop small-scale high power pulse systems with high performance, with the further necessity of high-power pulse system in the military and civilian field, such as ERA (Electric Reactive Armor) and AED (Automated External Defibrillator).Dielectric capacitor, combining stable energy storage with high power, is the core device that has been widely applied in pulsed power system. The dielectric capacitors possess the highest power density as compared with other capacitors, such as polymer capacitors, electrochemical capacitor, and etc. [6][7][8][9][10] However, their energy storage capability lags behind due to the lower energy density. The total size and weight of pulsed power system would be reduced significantly if equipping the capacitors with larger energy density. The limited number of charges on the surface of electrodes results in the low energy density of dielectric capacitors. [2][3][4] Many efforts have been done for increasing the specific surface area of the electrodes. Recently, the nanostructured capacitors with large specific surface areas are applied to achieve major advances in energy density of dielectric capacitors. [10,11] The nanostructured designs of dielectric capacitors can be achieved by two methods: a self-assembly technique for the ultracompact capacitors, [3,4,[12][13][14][15][16][17][18][19][20] and metal-insulator-metal (MIM) capacitors in porous templates [2,3,[11][12][13][14][15][16][17][18][19][20][21] (a 3D nanopore template of anodic aluminum oxide (AAO) with multilayer film deposition into the nanopores, and a nanopillars silicon template with multilayer film deposition). These methods for increasing the specific surface area of the electrodes are demonstrated to effectively improve the energy density of capacitors. The ultrahigh capacitance density of dielectric capacitor was reported to 100 uF cm −2 , which is 105 larger than that of planer dielectric capacitors. [3,4,[18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33] However, these nanostructured dielectric capacitors just use MIM thin films in 3D nanopore template, which cannot undertake such large voltage in pulse power systems.Dielectric material capacitor is the best choose for ultrahigh pulse power energy storage. The development of dielectric capacitors with both ultrahigh-power density and energy storage density is urgent. 3D dielectric capacitors exceed the conventional planar dielectric capacitors in terms of structure and performance, break through the energy storage limit of

Micro-nano structural electrode architecture for high power energy storage

“…To ensure high power density without sacrificing energy density, a strategy to simultaneously optimize ion and electron transport in interdigitated electrodes is proposed. Pikul and his colleagues developed highly conductive bicontinuous nanostructures using porous templates [21] . [21] , Copyright 2013, Nature Publishing Group.…”

“…Pikul and his colleagues developed highly conductive bicontinuous nanostructures using porous templates [21] . [21] , Copyright 2013, Nature Publishing Group. (c) The process sequence to prepare 3D interdigital electrodes dielectric capacitor.…”

“…(b) Ragone plot of microbattery cells and conventional power technologies. Reproduced with permission[21] , Copyright 2013, Nature Publishing Group. (c) The process sequence to prepare 3D interdigital electrodes dielectric capacitor.…”