3D Measurement of rough objects based on dual wavelength digital holography

Abstract

Traditional topography measurements for rough objects are usually based on point-contact scan. The way of pointcontact scan is usually not a high-efficient way to obtain data. Hence, in practice, only a few traces are measured which result in limited data. In order to obtain topography of sufficient amount of data, the demand for rapid noncontact measurement is increasing. In this work, we propose a dual wavelength digital holography (DWDH) measurement system with a synthetic wavelength of 51µm . We apply the DWDH system for 3D measurement of rougher surfaces and objects with a complex and small-size structure to further explore the measurement capability of DWDH. The proposed system enables the possibility to obtain the entire topography with millions of points of a rough surface in a single noncontact measurement. Firstly, we measure a cylinder workpiece of 10mm radius with a large roughness of Ra = 2.6µm which causes severe noise to measurement. The measured radius is 9.8099mm, which indicates a good accuracy. The mean standard deviation of all measured points is 1.08µm, which indicates a good repeatability and good anti-noise capability of the DWDH system. Then the proposed system is applied to measure the tooth surface of a gear of 1mm module and 18 teeth which has a complex and small-size structure. The measured surface shape agrees with the ideal gear tooth surface shape well. And the mean standard deviation of all measured points is 0.94µm , which also verifies its good repeatability. Our work presents the possibility of broader DWDH applications in industrial topography measurements.