3D Profile Measurement for Micro-Optical Component by Using Digital Holographic Microscopy

Characterization of Polarization Holographic Gratings Obtained on Azopolymer Thin Films by Digital Holographic Microscopy

“…[3][4][5] Digital holographic microscopy (DHM) is a quantitative phase imaging instrument [6], where complex amplitude (amplitude and phase) of light interacting with a sample are measured, by hologram acquisition. Various modifications of such microscopes are known, including a digital holographic white light microscope based on spectral phase shifting [7] DHM can also be used for 3D analysis of the profile of micro-optical components with the highest resolution [8][9].…”