3D x-ray fluorescence microscopy with 1.7 μm resolution using lithographically fabricated micro-channel arrays

Woll, Arthur R.; Agyeman-Budu, David N.; Bilderback, Donald H.; Dale, Darren; Kazimirov, A.; Pfeifer, M. A.; Plautz, Tia; Szebenyi, Thomas; Untracht, Gavrielle R.

doi:10.1117/12.944365

Cited by 10 publications

(15 citation statements)

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“…Figures 2a-b correspond closely to the optics described in both Refs. [15] and [16], and demonstrate visually the behavior of these optics described above: at energies above about 10 keV, their absorbing power becomes insufficient to provide sufficient background reduction.…”

Section: Channel Designmentioning

confidence: 65%

“…Ref. [15] also shows that, owing to strong diffuse reflection by the (continuous) channel walls, the angular selectivity δ was much larger than the geometric collimation w/l. Ref.…”

Section: Mask Designmentioning

confidence: 96%

“…[15], collimating channel arrays are characterized by their width w, length l, depth d, working distance f , and the total number of channels N. An additional parameter, δ, corresponds to the angular acceptance of the channels 1 . In the limit that the channels are perfect collimators, δ = w/l.…”

Section: Channel Designmentioning

confidence: 99%

“…[15] suffered from a very small working distance f of 0.2 mm and limited channel depth d of 30-50 µm. Ref.…”

Section: Mask Designmentioning

confidence: 99%

“…Recently, we demonstrated the first use of lithographically-etched channel arrays in silicon as a collection optic for CXRF [15,16], as well as their application towards 3D-resolved micro-XANES in ancient stained glass [17]. The experimental configuration is shown schematically in Figure 1, illustrating that the channels function as an array of collimators.…”

Section: Introductionmentioning

confidence: 99%

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Germanium collimating micro-channel arrays for high resolution, high energy confocal X-ray fluorescence microscopy

Agyeman-Budu¹,

Choudhury²,

Coulthard³

et al. 2016

AIP Conference Proceedings

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Abstract. Confocal x-ray fluorescence microscopy (CXRF) allows direct detection of x-ray fluorescence from a micron-scale 3D volume of an extended, unthinned sample. We have previously demonstrated the use of a novel collection optic, fabricated from silicon, that improves the spatial resolution of this approach by an order of magnitude over CXRF using polycapillaries. The optic, called a collimating channel array (CCA), consists of micron-scale, lithographically-fabricated arrays of collimating channels, all directed towards a single source position. Due to the limited absorbing power of silicon, the useful energy range of these optics was limited to fluorescence emission below about 10 keV. Here, we report fabrication of CCAs from germanium substrates, and demonstrate their practical use for CXRF up to 20 keV. Specifically we demonstrate a nearly energy-independent critical spatial resolution d R of 2.1±0.17 µm from 2-20 keV, as well as excellent background reduction compared to silicon-based CCAs throughout this energy range. Design details of the optic and background-reduction holder are described. Two versions of the optic are now available upon request at the beamline 20ID-B, Advanced Photon Source (APS) -Argonne National Laboratory.

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Section: Channel Designmentioning

confidence: 65%

“…Ref. [15] also shows that, owing to strong diffuse reflection by the (continuous) channel walls, the angular selectivity δ was much larger than the geometric collimation w/l. Ref.…”

Section: Mask Designmentioning

confidence: 96%

Section: Channel Designmentioning

confidence: 99%

“…[15] suffered from a very small working distance f of 0.2 mm and limited channel depth d of 30-50 µm. Ref.…”

Section: Mask Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Germanium collimating micro-channel arrays for high resolution, high energy confocal X-ray fluorescence microscopy

Agyeman-Budu¹,

Choudhury²,

Coulthard³

et al. 2016

AIP Conference Proceedings

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Non-invasive and Non-destructive Examination of Artists’ Pigments, Paints and Paintings by Means of X-Ray Imaging Methods

Vanmeert

Meyer

Gestels

et al. 2022

Cultural Heritage Science

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Non-Invasive and Non-Destructive Examination of Artistic Pigments, Paints, and Paintings by Means of X-Ray Methods

et al. 2016

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Recent studies are concisely reviewed, in which X-ray beams of (sub)micrometre to millimetre dimensions have been used for non-destructive analysis and characterization of pigments, minute paint samples, and/or entire paintings from the seventeenth to the early twentieth century painters. The overview presented encompasses the use of laboratory and synchrotron radiation-based instrumentation and deals with the use of several variants of X-ray fluorescence (XRF) as a method of elemental analysis and imaging, as well as with the combined use of X-ray diffraction (XRD) and X-ray absorption spectroscopy (XAS). Microscopic XRF is a variant of the method that is well suited to visualize the elemental distribution of key elements, mostly metals, present in paint multi-layers, on the length scale from 1 to 100 μm inside micro-samples taken from paintings. In the context of the characterization of artists' pigments subjected to natural degradation, the use of methods limited to elemental analysis or imaging usually is not sufficient to elucidate the chemical transformations that have taken place. However, at synchrotron facilities, combinations of μ-XRF with related methods such as μ-XAS and μ-XRD have proven themselves to be very suitable for such studies. Their use is often combined with microscopic Fourier transform infra-red spectroscopy and/or Raman microscopy since these methods deliver complementary information of high molecular specificity at more or less the same length scale as the X-ray microprobe techniques. Since microscopic investigation of a relatively limited number of minute paint samples, taken from a given work of art, may not yield representative information about the entire artefact, several methods for macroscopic, non-invasive imaging have recently been developed. Those based on XRF scanning and full-field hyperspectral imaging appear very promising; some recent published results are discussed.

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3D x-ray fluorescence microscopy with 1.7 μm resolution using lithographically fabricated micro-channel arrays

Cited by 10 publications

References 0 publications

Germanium collimating micro-channel arrays for high resolution, high energy confocal X-ray fluorescence microscopy

Germanium collimating micro-channel arrays for high resolution, high energy confocal X-ray fluorescence microscopy

Non-invasive and Non-destructive Examination of Artists’ Pigments, Paints and Paintings by Means of X-Ray Imaging Methods

Non-Invasive and Non-Destructive Examination of Artistic Pigments, Paints, and Paintings by Means of X-Ray Methods

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