48.2: Dark Alloyed Metal‐Oxides for Sputter Deposition: Material comparison and processability

Abstract

Metal‐oxides (MeOx), for example electrical conducting sub‐stoichiometric Molybdenum‐Oxide (MoOx) can be used to create dark layers to cover otherwise reflective lines. While the optical properties are well developed and understood, this work focuses on the investigation of chemical stability, relevant for process integration. For this we analyze and compare different alloys and summarize the thin film properties for different applications.