57‐2: High performance LTPS TFT Backplane Using Blue Laser Diode Annealing for Mini/Micro LED Display

Abstract

In this paper, BLDA technology has been applied to realize the preparation of a LTPS TFT without ion implantation. The BLDA LTPS TFT gives the advantages of high mobility (~ 290.5 cm2/Vs), a smaller subthreshold voltage swing, kink‐free output curve, and excellent device stability under PBTS. The backplane technology has been successfully applied in 7.1‐inch Mini‐LED display products, and the lighting effect is uniform. This low‐cost technique is very suitable for the LTPS TFT backplane for large area, high resolution Mini/Micro LED displays.