6 DOF force and torque sensor for micro-manipulation applications

Estévez, P. A.; Bank, J.M.; Porta, Marcello; Wei, Jia; Sarro, P.M.; Tichem, Marcel; Staufer, U.

doi:10.1016/j.sna.2012.02.037

Cited by 43 publications

(25 citation statements)

References 12 publications

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“…4 The most common device for measuring cutting forces in this manufacturing processes is the piezoelectric dynamometer. In order to follow the miniature trend, the cutting-force measurement based on the piezoelectric principle has been extensively studied.…”

Section: Introductionmentioning

confidence: 99%

Sensitivity enhancement of piezoelectric force sensors by using multiple piezoelectric effects

Zhang

Kan

et al. 2016

AIP Advances

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The sensitivity enhancement of piezoelectric force sensors is investigated based on multiple piezoelectric effects in this paper. At first, theoretical analysis showed that multiple piezoelectric effects had an influence on the piezoelectric force sensors. Secondly, a practicable method was adopted to perform the experimental validation and quantify the influence of multiple piezoelectric effects. In the method, different capacitors whose capacitances became much larger than that of the piezoelectric quartz sensor were in parallel with the quartz sensor. With the method, the details of the sensitivity enhancement of piezoelectric sensors were obtained. Experimental results showed that the sensor sensitivity increased from 4.00 pC/N to 4.07 pC/N when the capacitance of parallel capacitors was increased from 500 to 1000 and then 5000 times of that of the sensor. The force sensor sensitivity was improved by 1.75%. However, the nonlinearity and repeatability error of the force sensor were markedly increased with increasing the capacitance of the parallel capacitor. The method demonstrated that the piezoelectric force sensor sensitivity could be enhanced to a certain extent in the practical engineering, but it also brought some negative effects. Finally, further analysis indicated that multiple piezoelectric effects influenced the sensitivity by changing the piezoelectric coefficient. The well-known piezoelectric coefficient d11 of the quartz could actually reach 2.35 pC/N.

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Section: Introductionmentioning

confidence: 99%

Sensitivity enhancement of piezoelectric force sensors by using multiple piezoelectric effects

Zhang

Kan

et al. 2016

AIP Advances

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“…Among the identified various tactile sensing principles, capacitive type tactile sensing [1], [8], piezoelectric type sensing [9], piezoresistive type tactile sensing [10], [11], mechanical strain gauges [12] and optical type tactile sensing [13], [14] can be identified as most common types available. They have their own pros and cons based on their applications and scale [2].…”

Section: Introductionmentioning

confidence: 99%

“…Most of available MEMS tactile sensor measurements are in limited number of DOFs [13], [9], [11]. MEMS based tactile sensors for higher number of degrees of freedom are very infrequent and they just measure 3 linear DOFs and some more rotational DOFs [10].…”

Section: Introductionmentioning

confidence: 99%

Design and simulation of MEMS based 5-DOF tactile force sensor

Udayanga

Jayathilaka

Amarasinghe

et al. 2016

2016 Moratuwa Engineering Research Conference (MERCon)

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This paper describes design and simulation of five degrees of freedom (5-DOF) Micro-Electro-Mechanical systems (MEMS) based tactile force sensor. Tactile sensing involves with measuring physical parameters such as force, temperature, etc. with the aid of physical touch. Over the past decades tactile sensors are gaining popularity over non-contact sensors in biomedical and robotic applications. Proposed sensor design with 3mm x 3mm x 300µm dimensions, has the capability to measure not only the magnitude but also the direction of the force applied. A wagon wheel spring structure was proposed, where 8 beams work as springs to relief the force applied. Behavior of these 8 beams are monitored under each loading conditions using defused piezoresistive sensing elements. A finite element analysis of structure was performed to optimize and validate the structure and Multiphysics analysis was performed to validate the working principal of the proposed sensor.

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“…FL presented an absolute angular position sensor; in this sensor, the angle position can be calculated based on the relationships of the sine and cosine signals, which are produced by emitters of the inner and the outer circles; 15 Shteinberg considered the particular features of the measurement of the torque of a rotating shaft using a surface acoustic wave sensor were considered. 16 Estevez presented a piezo-resistive 6-degrees of freedom force and torque sensor to be used in micro-manipulation, 17 including the designation, fabrication, and characterizations. Yeh proposed a thinlayered torque sensor with a fully digital signal processing circuit, 18 in which two sets of photo-detectors cooperate with the two discs with optical gratings to generate two pulse sequences, and a time delay between these two pulse sequences can be acquired as long as the shaft is twisted by a torque.…”

Section: Introductionmentioning

confidence: 99%

A differential electromagnetic induction torque sensor and its finite element analysis

Zhao

2015

Review of Scientific Instruments

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Torque is an important parameter for condition monitoring and fault diagnosis for rotary machines. This paper describes a new structure differential torque sensor based on the principle of electromagnetic induction. The method involves the construction of a pulsating flux by the excitation winding of the sensor, and the torsion angle produced by the load torque is converted into the angle displacements of the excitation winding and the output winding. Last, the output winding of sensor generates an induction potential force, which is proportional to the load torque as seen through electromagnetic coupling. Sensor sensitivity would be reduced by load effect; therefore, this paper presents a suppression method that can ensure the sensitivity is not affected. The transfer function of the sensor is constructed through Laplace transformation. The sensor characteristics are simulated by finite elements, including the influence of winding coil numbers and excitation voltage frequency. The sensor was calibrated by a torsion testing machine, and the experimental results indicated that the sensitivity of the sensor is about 18.2 mV/Nm, the non-repeatability error is about 2.3%, the non-linear error is about 3.3%, and the hysteresis error is about 2.6%.

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6 DOF force and torque sensor for micro-manipulation applications

Abstract: This paper pr and torque se beams and a probes. The g crosstalk and and torques f compatible p dynamic adju linear range o square errors

Cited by 43 publications

References 12 publications

Sensitivity enhancement of piezoelectric force sensors by using multiple piezoelectric effects

Sensitivity enhancement of piezoelectric force sensors by using multiple piezoelectric effects

Design and simulation of MEMS based 5-DOF tactile force sensor

A differential electromagnetic induction torque sensor and its finite element analysis

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