69.3: Novel Co-Evaporation Source for Large Area OLED Panel Manufacturing

Abstract

Results of an innovative, valved evaporation source are presented that allows uniform co-evaporation of two or more materials onto 600mmx700mm substrate panels for OLED manufacturing. Key features of the source include high deposition yield on stationary substrates, integral precision flux control, and in-vacuum material refilling for maximum process up-time.