71.2: Distinguished Paper: iMoD™ Display Manufacturing

Abstract

QUALCOMM has developed and transferred to manufacturing iMoD Displays, a MEMS‐based reflective display technology. The iMoD array architecture allows for development at wafer scale, yet easily scales‐up to enable fabrication on flat‐panel display (FPD) lines. In this paper, we will describe the device operation, process flow and fabrication, technology transfer issues, and display performance.