A 160&amp;#x00D7;160-pixel image sensor for multispectral visible, infrared and terahertz detection

Perenzoni, Matteo; Massari, Nicola; Stoppa, David; Pocas, S.; Delplanque, Baptiste; Meilhan, Jean–Baptiste; Simoens, F.; Rabaud, W.

doi:10.1109/esscirc.2012.6341264

Cited by 6 publications

(5 citation statements)

References 6 publications

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“…The characterization of the second type of prototyped array described in §3 (figure 5b) showed state-of-the-art performance for each channel [26]. The figure 5a presents the visible and THz channel outputs when a paper optical test pattern is standing in the way of a QCL beam optical path.…”

Section: (C) Imaging Application Demonstrationsmentioning

confidence: 96%

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Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

Simoens

Meilhan

2014

Phil. Trans. R. Soc. A.

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The development of terahertz (THz) applications is slowed down by the availability of affordable, easyto-use and highly sensitive detectors. CEA-Leti took up this challenge by tailoring the mature infrared (IR) bolometer technology for optimized THz sensing. The key feature of these detectors relies on the separation between electromagnetic absorption and the thermometer. For each pixel, specific structures of antennas and a resonant quarter-wavelength cavity couple efficiently the THz radiation on a broadband range, while a central silicon microbridge bolometer resistance is read out by a complementary metal oxide semiconductor circuit. 320 × 240 pixel arrays have been designed and manufactured: a better than 30 pW power direct detection threshold per pixel has been demonstrated in the 2-4 THz range. Such performance is expected on the whole THz range by proper tailoring of the antennas while keeping the technological stack largely unchanged. This paper gives an overview of the developed bolometer-based technology. First, it describes the technology and reports the latest performance characterizations. Then imaging demonstrations are presented, such as realtime reflectance imaging of a large surface of hidden objects and THz time-domain spectroscopy beam twodimensional profiling. Finally, perspectives of camera integration for scientific and industrial applications are discussed.

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Section: (C) Imaging Application Demonstrationsmentioning

confidence: 96%

“…First, a large 320 × 240 pixel chip has been developed and integrated in a compact video camera housing [25]. A second chip integrates THz bolometers with visible and IR pixels to act as a tri-spectral monolithic detector [26].…”

Section: Prototyped Terahertz Bolometer Arraysmentioning

confidence: 99%

Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

Simoens

Meilhan

2014

Phil. Trans. R. Soc. A.

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“…In recent years, multi spectra imaging systems to gather distinct individual information distributed over terahertz, infrared, and visible spectral ranges simultaneously have attracted considerable attention from the diverse applications especially in space and security technologies [1]. Most recently, Iain et al has proposed synthetic multi-spectral materials (SMMs) [2,3] by integrating the plasmonic color filter and terahertz metamaterial filter into a single structure and revealed that the SMMs can maximize the spectral information density of multi-spectral imaging system.…”

Section: Introductionmentioning

confidence: 99%

Synthetic Multi-Spectral Material Filter Based on Terahertz Metamaterial Combined with Thin-Film Etalon Structure

Kang¹,

Jung²,

Lee³

2014

Extended Abstracts of the 2014 International Conference on Solid State Devices and Materials

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In this paper, we demonstrate a numerical and experimental study of novel synthetic multi-spectral material (SMM) filters for visible and terahertz ranges. The proposed filter is based on double-layered complementary split ring resonators (CSRRs) combine with a thin-film etalon structure. The fabricated SMM filter can be fully the fabricated by conventional photolithography process to be confirmed to work as the transmissive color filter as well as the polarization dependent terahertz filter.

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“…As an example, Perenzoni et. al have developed a 160 x160 pixel CMOS chip that contain Si photodiodes for visible detection and micro-bolometer sensors for IR and THz detection [5]. However the different wavelength sensors are not coaxial and therefore the visible/IR and THz must be detected on different regions of the CMOS chip.…”

Section: Introductionmentioning

confidence: 99%

Multi-spectral materials: hybridisation of optical plasmonic filters, a mid infrared metamaterial absorber and a terahertz metamaterial absorber

2016

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Multi-spectral imaging systems typically require the cumbersome integration of disparate filtering materials and detectors in order to operate simultaneously in multiple spectral regions. Each distinct waveband must be detected at different spatial locations on a single chip or by separate chips optimised for each band. Here, we report on a single component that optically multiplexes visible, Mid Infrared (4.5 μm) and Terahertz (126 μm) radiation thereby maximising the spectral information density. We hybridise plasmonic and metamaterial structures to form a device capable of simultaneously filtering 15 visible wavelengths and absorbing Mid Infrared and Terahertz. Our synthetic multi-spectral component could be integrated with silicon complementary metal-oxide semiconductor technology where Si photodiodes are available to detect the visible radiation and micro-bolometers available to detect the Infrared/Terahertz and render an inexpensive, mass-producible camera capable of forming coaxial visible, Infrared and Terahertz images.

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A 160×160-pixel image sensor for multispectral visible, infrared and terahertz detection

Cited by 6 publications

References 6 publications

Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

Synthetic Multi-Spectral Material Filter Based on Terahertz Metamaterial Combined with Thin-Film Etalon Structure

Multi-spectral materials: hybridisation of optical plasmonic filters, a mid infrared metamaterial absorber and a terahertz metamaterial absorber

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