A 2/3-inch 2M-pixel STACK-CCD imager

Abstract

Shrinking pixel size in conventional CCD imagers degrades device performance. Unsatisfactory smear noise of -90dB is attained in a Y3-inch 2M pixel CCD imager Ill. The STACK-CCD imager has a great advantage regarding this problem. A 100% aperture ratio and low smear noise are maintained regardless of future pixel shrinking, because CCD scanning circuits are overlaid with a n amorphous silicon (a-Si) photoconversion layer.