A 3D-printed micro-hemispherical shell resonator with electrostatic tuning for Coriolis vibratory gyroscope

Abstract

The emergence of micro-hemispherical resonant gyroscopes, combining the advantages of exceptional stability and long lifetime with miniaturization, has opened up new possibilities for the development of whole-angle gyroscopes. The primary drawback of the existing methods used for manufacturing micro-hemispherical resonant gyroscopes based on MEMS technology is the intricate and costly process involved. Here we report the design, fabrication, and characterization of the first 3D-printable micro-hemispherical shell resonator for Coriolis vibrating gyroscope. One remarkable advancement is fabrication in just two steps, rather than the dozen or so steps of traditional micromachining. Utilizing the intricate shaping capability and ultra-high precision offered by projection micro stereolithography, we are able to fabricate 3D high-aspect-ratio resonant structures and controllable capacitive air gaps, both of which are extremely difficult for MEMS technology. In addition, the fabricated resonators can be tuned for resonance frequency by electrostatic forces and exhibit higher quality factor in air compared to MEMS micro-hemispherical resonators. This work demonstrates the feasibility of rapidly batch-manufacturing micro-hemispherical shell resonators, paving the way for the development of micro-hemispherical resonator gyroscopes for portable inertial navigation. Concurrently, this particular design concept could be further applied to increase the uptake in the MEMS community.