Conference Record of the 1991 International Display Research Conference
DOI: 10.1109/displ.1991.167474
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A 9.5 inch, 1.3 mega-pixel low temperature poly-Si TFT-LCD fabricated by SPC of very thin films and an ECR-CVD gate insulator

Thomas W. Little
1
,
Hideki Koike
2
,
Kenichi Takahara
3
et al.
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