A Batch Fabricated SECM-AFM Probe

Abstract

A scheme for the fabrication of combined Scanning Electrochemical Microscopy -Atomic Force Microscopy (SECM-AFM) probes is presented for both silicon nitride and silicon cantilevers. The advantages over exsisting methods used for their production is explained. The process flow is described and initial results from electrodeposition of silver are presented This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: 128.184.220.23 On: Tue