Fifteenth International Conference on Machine Vision (ICMV 2022) 2023
DOI: 10.1117/12.2679415
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A coarse-to-fine angle automatic correction method for glassivation passivation parts wafer

Abstract: Due to the characteristics of small die size, large number of dies and large initial swing angle of glassivation passivation parts (GPP) wafer, it becomes a more troublesome problem to accurately correct the wafer angle. To solve this difficulty, a coarse-to-fine angle automatic correction method for GPP wafer is proposed in this paper. First, we design and implement the GPP wafer angle automatic correction system. Then, for the large initial wafer swing angle problem, the coarse correction method based on Hou… Show more

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