A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge

Lin, Tee; Zargar, Omid Ali; Chen, Hen-Lin; Huang, Yu-Nung; Hu, Shih−Cheng; Leggett, Graham

doi:10.1109/tsm.2021.3128588

Cited by 5 publications

(3 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Δ[O 2 ] is the standard deviation of oxygen concentration, and was obtained through sequential measurements. The term relating to I p can be expressed as signal-to-noise ratio (SNR), which relates to the performance of the hardware in the measurement system, as shown in equation (3). The SNR of the phosphorescent signal can be obtained by calculating the ratio of the mean (I p ) to the standard deviation (ΔI p ) of the signal.…”

Section: Performance Evaluation Methods Of Oxygen Probesmentioning

confidence: 99%

“…Oxygen, a colorless and tasteless gaseous element, holds a central position as an essential component for the sustenance of all known life forms [1]. Its distinctive properties render it indispensable in numerous industrial processes and medical treatments, primarily through its role in facilitating respiration and combustion [2][3][4]. In the context of industrial production, where the utilization or release of oxygen is closely monitored by regulatory bodies, precise measurement of its concentration becomes paramount.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A wide range oxygen sensing strategy with the collaboration of multiple phosphorescence probes

Wang,

Sun,

Peng

et al. 2024

Phys. Scr.

View full text Add to dashboard Cite

A wide range oxygen measurement system with the relative measurement error of less than 1.5% across 4 orders of magnitude of oxygen dynamic range has been developed. We proposed a theoretical evaluation method of the measurement capability of oxygen probes, which points that the relative measurement error (δ) is equal to the reciprocal of the product of signal-to-noise ratio (SNR) and relative sensitivity (S r). A minimum value point in the curve of δ with oxygen concentration is existing due to the opposite trends of SNR and S r Based on the evaluation results, an oxygen probe group was selected scientifically for wide range oxygen measurement. The efficacy of the developed measurement system, featuring adaptive oxygen probe switching, was verified through testing, confirming its compliance with accuracy requirements for measurements.

show abstract

Section: Performance Evaluation Methods Of Oxygen Probesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A wide range oxygen sensing strategy with the collaboration of multiple phosphorescence probes

Wang,

Sun,

Peng

et al. 2024

Phys. Scr.

View full text Add to dashboard Cite

show abstract

“…A high-pressure dry air was continuously pumped into diffuser tubes, and the dry air permeated out of the micron-sized holes in the diffuser tube surfaces while purging the fine dust particles or AMC off the wafer surface inside the FOUP. This process can dehumidify the wafer surface [11]. Diffuser tubes are hollow circular tubes, and the gas pressure difference is diffused by foaming and perforating the polymer surface.…”

Section: J=-d DX Dcmentioning

confidence: 99%

The Study of Velocity Field in Front Opening Unified Pod by CAE

Lin,

Hwang,

Zhu

2023

View full text Add to dashboard Cite

The front opening unified pod (FOUP) is a packing box for contamination control for semiconductor wafer transport. As the wafer fabrication process developes towards nanoor atom level, the semiconductor wafer storage device should advance from the particle prevention function into the airborne molecular contamination (AMC) removal function. Therefore, it is necessary to design/redesign a function for removing AMC or moisture inside the FOUP. This study used the design of leading diffuser tubes in the FOUP and pores in the surfaces of diffuser tubes to generate gas diffusion. This is to achieve a uniform distribution of the wafer surface velocity field and a uniform dehumidification function of the wafer surface. Based on the analysis results, when circular diffuser tubes are introduced in the FOUP and the intake air flow was set at 0.2-0.3 m3/hr, the interlayer wafer surface in the FOUP could achieve uniform distribution of velocity field. As a result, the humidity difference among various zones of wafer surface could be reduced, and the yield and quality of the wafer cutting process could be controlled.

show abstract

A comparative study of a front opening unified pod (FOUP) moisture removal efficiency with different purging gases

Benalcazar

Lin²,

Hu³

et al. 2022

International Journal of Thermofluids

View full text Add to dashboard Cite

A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge

Cited by 5 publications

References 16 publications

A wide range oxygen sensing strategy with the collaboration of multiple phosphorescence probes

A wide range oxygen sensing strategy with the collaboration of multiple phosphorescence probes

The Study of Velocity Field in Front Opening Unified Pod by CAE

A comparative study of a front opening unified pod (FOUP) moisture removal efficiency with different purging gases

Contact Info

Product

Resources

About