Abstract:Silicon carbide (SiC) is a material that possesses hardness and robustness to operate under high temperature condition. This work is a pilot in exploring the feasibility of cubic piezo element on the SiC wafer with integrated proof mass as horizontal cantilever with perpendicular displacement with respect to the normal plane. With the advance of electronic circuitry, the power consumption is reduced to nanowatts. Therefore, harvesting ambient energy and converting into electrical energy through piezoelectric m… Show more
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