A Comprehensive Study of Nonuniformity Properties of the LiCoO2 Thin-Film Cathode Fabricated by RF Sputtering

Kurbatov, S. V.; Rudy, A. S.; Naumov, V. V.; Mironenko, A. A.; Savenko, O. V.; Smirnova, M. A.; Mazaletsky, L. A.; Pukhov, D. E.

doi:10.1134/s1063739724600250

Russ Microelectron

2024

DOI: 10.1134/s1063739724600250

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A Comprehensive Study of Nonuniformity Properties of the LiCoO2 Thin-Film Cathode Fabricated by RF Sputtering

S. V. Kurbatov,

A. S. Rudy,

V. V. Naumov

et al.

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A Comprehensive Study of Nonuniformity Properties of the LiCoO2 Thin-Film Cathode Fabricated by RF Sputtering

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References 44 publications

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